课程名称 (Course Name) ： Micromachined Sensors

课程代码 (Course Code）：  ES28009

学分/学时 (Credits/Credit Hours)： 3/48

开课时间 (Course Term )：  Fall

开课学院（School Providing the Course）:  Micro/Nano electronics Department

任课教师（Teacher）:   Xuhan Dai

课程讨论时数（Course Discussion Hours）: 5

课程实验数（Lab Hours）:   2

课程内容简介(Course Introduction):

“More than Moore” is a significant trend for the development of IC industry. The combination of the semiconductor technology and various disciplines such as Mechanics, Optics, Chemistry, Biology etc. constitutes the technology foundation of the micro sensors, which see more and more application in fields like automobile and consumer electronics. Micro-machined sensors, focusing on basic mechanisms of transduction, fabrication techniques, signal processing method, and the relative merits of different technologies. In addition, the student will master the ability to acquire the documents that reflects the cutting-edge research in these fields. In this way, the student will be well prepared for future research in these areas.

教学大纲(Course Teaching Outline):

Chapter 1  Course Introduction (6 hours) will give a general introduction of the industrial background for the research in micro-machined sensors. Then the content for each chapter will be demonstrated briefly. In addition, different ways to acquire the documents through web search engines, academic/patent/thesis index will be instructed. In this way, the students would master the efficient way to get the information in micro-machined sensor.

Chapter2. the Microfabrication method ( 9 hours) will give a general introduction of the special micro-fabrication technologies for various 3-D microstructures in micro-sensors.

1)      Bulk micro-machining technology

2)      Surface micro-machining technology

3)      Bonding technology

Chapter 3. Mechanical sensors ( 9 hours) will introduce the principle, fabrication and performance characteristics of the following three sensors.

1)      Micro-Accelerometers

2)      Gyros

3)      Pressure Sensors

Chapter 4. Optical Sensors ( 9 hours)

1)      Principles of Optical-Electro transduction

2)      Direct Optical Sensors( including the photomultiplier, photodiodes, PIN detector, CCD and  CMOS image sensors)

3)      Indirect Optical Sensors ( including the infrared sensor, pyroelectric dector, thermopile detector, microbolometer)

4)      Bio-Optical sensors ( the configuration of the human eyes and the research on artificial vision will be introduced)

Chapter 5. Heat Sensors (3 hours)

1)      Principle of heat transfer

2)      Thermal-resist sensor

3)      Thermopile sensor

4)      Heat pipe and micro-channel heat-sink for micro-scale heat transfer

Chapter 6 Magnetic Sensors (3 hours)

1)      Principle of Magnetic field

2)      Hall effect sensor

3)      Fluxgate sensor

Chapter 7. Chemical and Bio-sensors (3 hours)

1)      Chemical gas sensor

2)      Micro Bio-sensors（uTAs such as Polymerase Chain Reaction(PCR) chips）

Chaper 8 Weak Signal Processing Method for sensors (3 hours)

1)      Principle of Correlation detection (CR)

2)      Application of CR in micro-sensors

课程进度计划(Course Schedule):

Content                  Academic Hours

1．Course Introduction                     6

2．Microfabrication method                 9

3.  Mechanical Sensors                    9

4．Optical Sensors                         9

5  Heat Sensors                           6

6  Magnetic Sensors                       3

7  Chemical and Bio-Sensors                3

            8  Weak Signal Processing Method for sensors  3

课程考核要求(Course Assessment Requirements)：

 3 Case Studies, The final score will based on the scores of the 3 Case Studies

参考文献(Course References)：

1.         Micromachined Sensors：Principle,Technology ,Application, ISBN:97873130429032005.12.1

2.     Gregory T. A. Kovac, Micromachined Transducers Sourcebook, WCB/McGraw-Hill, 1998

预修课程（Prerequisite Course）

 Introduction to Integrated Circuit Technology