课程名称 (Course Name) ： Micro/nano Fabrication and Micro Electro Mechanical Systems

课程代码 (Course Code）： IN26016

学分/学时 (Credits/Credit Hours)：3

开课时间 (Course Term )：  fall

开课学院（School Providing the Course）:  SEIEE-Instrument Department

任课教师（Teacher）:  Di Chen， Dasheng Liu

课程讨论时数（Course Discussion Hours）:  

课程实验数（Lab Hours）:   

课程内容简介(Course Introduction):

This course will introduce Micro/nano Fabrication and Micro Electro Mechanical Systems （MEMS）. Including Semiconductor substrate, diffusion, Thermal oxidation, Ion implantation, lithography, photoresist, vacuum science and plasmas, etching, evaporation, sputtering, CVD, CMOS technologies. MEMS including Mechanical Transducers, Optical Transducers, Thermal Transducers, Magnetic Transducers, Ionizing Radiation Transducers, Chemical Transducers, biological Transducers and Microfluidic Transducers.

This course is in English. Through this course, knowledge of Micro/nano Fabrication and MEMS will be introduced.

教学大纲(Course Teaching Outline):

1.         Introduction

What is MEMS, MEMS market, MEMS applications, Semiconductor substrates

2.         Micro/nano Fabrication 1

Diffusion, Thermal oxidation

3.         Micro/nano Fabrication 2

Ion implantation, Optical lithography,

4.         Micro/nano Fabrication 3

Photoresists, Nonoptical lithography

5.         Micro/nano Fabrication 4

Vacuum Science and Plasmas, Etching,

6.         Micro/nano Fabrication 5

Evaporation and Sputtering, CVD

CMOS Technologies, Silicon bulk and surface process, LIGA technique

7.         Mechanical Transducers

sensing mechanisms, accelerometers, gyroscops, pressure sensors, microphones, tactile sensors; Mechanical actuators: actuation mechanisms, mechanical resonators, mechanical relays and RF switches

8.         Optical Transducers 1

Optical sensors, Optical actuators, Micromachined optical structures

9.         Thermal Transducers

Temperature measurements, Thermal actuators, Thermal sensor/actuator combinations, Thermal gas pressure sensors, Thermal flow sensors

10.     Magnetic & Electromagnetic transducers

Magnetic phenomena, Magnetic sensors, Magnetic actuators, Micromachined electromagnetic devices

11.     Ionizing Radiation Transducers

Ionization-based detectors, Scintillation detectors, Direct solid-state radiation detectors, Radiation effects on electronics and biology

12.     Chemical and biological Transducers

Chemical sensors, Chemical actuators, Bioelectric interface devices, Hybrid biosensors

课程进度计划(Course Schedule):

13.     Introduction

What is MEMS, MEMS market, MEMS applications, Semiconductor substrates

14.     Micro/nano Fabrication 1

Diffusion, Thermal oxidation

15.     Micro/nano Fabrication 2

Ion implantation, Optical lithography,

16.     Micro/nano Fabrication 3

Photoresists, Nonoptical lithography

17.     Micro/nano Fabrication 4

Vacuum Science and Plasmas, Etching,

18.     Micro/nano Fabrication 5

Evaporation and Sputtering, CVD

CMOS Technologies, Silicon bulk and surface process, LIGA technique

19.     Mechanical Transducers

sensing mechanisms, accelerometers, gyroscops, pressure sensors, microphones, tactile sensors; Mechanical actuators: actuation mechanisms, mechanical resonators, mechanical relays and RF switches

20.     Optical Transducers 1

Optical sensors, Optical actuators, Micromachined optical structures

21.     Thermal Transducers

Temperature measurements, Thermal actuators, Thermal sensor/actuator combinations, Thermal gas pressure sensors, Thermal flow sensors

22.     Magnetic & Electromagnetic transducers

Magnetic phenomena, Magnetic sensors, Magnetic actuators, Micromachined electromagnetic devices

23.     Ionizing Radiation Transducers

Ionization-based detectors, Scintillation detectors, Direct solid-state radiation detectors, Radiation effects on electronics and biology

24.     Chemical and biological Transducers

Chemical sensors, Chemical actuators, Bioelectric interface devices, Hybrid biosensors

课程考核要求(Course Assessment Requirements)：

Test in course, final examination

参考文献(Course References)：

1.         S.A. Cambell; "Fabrication Engineering at the Micro- and Nanoscale"; 3rd Edition; Publishing House of Electronics Industry; 2010

G.T.A. Kovacs; “Micromachined Transducers”; The McGraw-Hill Companies, Inc.

预修课程（Prerequisite Course）

No