Micro-Nano Electronics

  • Name:Congchun Zhang
  • Title:Assocaiate Prof.
  • Office:2-310,integrated experimental building
  • Office Phone:021-34206687
  • Email:zhcc@sjtu.edu.cn
  • Website:

Research Field

electronic thin film and devices
microelectromechanical systems(MEMS),microfabrication
micro sensors and microactuators
sensors for harsh enviroment


1998-2002,Huazhong Univrsity of Science and Technology,Ph.D
1995-1998, Wuhan University of Technology,Master Degree
1991-1995,Wuhan University of Technology,Bachelor Degree

Work experience

2004-present Shanghai Jiao Tong University
2011.1-2012.2, visiting scholar,Columbia Universtiy,New York City, USA


thin film and devices,High temperature thin film sensors,

Awards and Honors

The morningstar young scholars award,Shanghai Jiao Tong University,2008
Outstanding young teachers candidate in Shanghai,2008,2009


Advanced Micro/Nano Fabrication technology:principle and devices


1. High temperature sensors fabricated on Al2O3 ceramic and nickel-based superalloy substrates SENSORS AND ACTUATORS A,2016,247
2. Preparation, characterization and application of high-temperature Al2O3 insulating film, SURFACE & COATINGS TECHNOLOGY SCI v 271, p 318-324, APR 15, 2016
3. Fabrication and characterization of ITO thin film resistance temperature detector, 2016 IEEE International Nanoelectronics Conference (INEC) EI:MAY 9-11, 2016
4. Fabrication and characterization of ITO thin film resistance temperature detector, Vacuum, May 27, 2016
5. Nanoporous copper films with high surface area formed by chemical dealloying from electroplated CuZn alloy, Micro and Nanosystems ,2016,
6. Design and simulation of a novel check valve made by SU-8 Advanced Mechanical Design,v 479-481, p 2271-2274, 2012
7. Preparation of (100)-oriented LaNiO(3) on Si for the textured Ba(0.5)Sr(0.5)TiO(3) thin films, APPLIED SURFACE,SCIENCE ,2008.12
8. Torsion/cantilever-based MEMS bistable mechanisms with different support configurations: structure design and comparison, Journal of Micromechanics and Microengineering, 2011.04
9. Vertically bidirectional bistable microrelay with magnetostatic and thermal actuations, MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2010.01
10. Effects of process parameters on the LaNiO3 thin films deposited by radio-frequency magnetron sputtering , THIN SOLID FILMS, 2009.10
11. Fabrication of low-stress low-stiffness leveraged cantilever beam for bistable mechanism,MICROELECTRONIC ENGINEERING, 2010.11
12. Design and implementation of a bistable microcantilever actuator for magnetostatic latching relay, MICROELECTRONICS JOURNAL, 2010.06
13. Magnetostatic bistable MEMS switch with electrothermal actuators,Electronic Letters, 2009.12
14. High tunable Ba0.5Sr0.5TiO3 thin film deposited on silicon substrate with MgO buffer layer, International Journal of Nanomanufacturing, 2011.11
15. study on utilizing a chloride bath to electroform MEMS devices with high aspect ratio structures, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2010.11A
16. Modeling, microfabrication and experiments of a free-free cantilever bistable micro mechanism supported with a diamond configuration Microsystem Technologies, 2010.11