Instrument Science and Engineering

  • Name:CHEN, Di
  • Title:Professor Dr.
  • Office:micro/nano Sci. & Eng. 2-309
  • Office Phone:021-34206992
  • Website:

Research Field

1. MEMS fabrication technique
2. microfluidics
3. Bio-MEMS


1986 Diploma Chemist, Department of Chemistry, University of Hamburg, Germany
1990 Doctor of Natural Science, Department of Chemistry, University of Hamburg, Germany

Work experience

05/1990 – 12/1992 Post doctoral researcher, MicroParts Company, Germany
01/1993 – 12/1995 Associate Professor, Department of Chemistry, Shanghai Jiao Tong University, China
01/1996 – present Professor, Research Institute of Micro/nano Science & Technology, Shanghai Jiao Tong University, China


1. 863: Study on key technique of artificial retina (12/1/2006 – 11/30/2008) PI
2. NSFC: Integrated probe card based on MEMS micro spring (1/1/2006 – 12/31/2008) PI
3. SIEMENS: Micro harverster from vibration energy (11/2008-12/2009) PI
4. 863: Non silicon surface microfabrication and flexible substrate technique (12/1/2006 – 11/30/2008) Co-PI
5. NSFC: Measurement of vision micro force based on blurred pictures and force information (1/2009-12/2012) Co-PI
6. Science and Technology Commission of Shanghai Municipality: Study on key technology of wireless brain dry electrode cap and driver alertness monitoring system (10/2009-10/2011) Co-PI
7. 973: Key science using nanotechnology to solve gastric cancer early detection, (2010-2014) Co-PI
8. Institute of Shanghai Aerospace: High aspect ratio non-silicon microfabrication technique, (2012-2014) PI
9. SJTU-UM Foundation: Soft Robotics Movement Sensing and Feedback for Preventing Falls in Older Adults, (2014-2016 PI

Awards and Honors

1. China: Second prize of Technology Invention (2008) (Ranking 4)
2. Shanghai: First prize of Technology Invention (2007) (Ranking 3)
3. Ministry of Education: Second Prize of Natural Science (2008) (Ranking 3)


Science and Engineering of Microelectronic Fabrication (in English)


1. J.H. Li, D. Chen* and G. Chen; “Low Temperature Thermal Bonding of PMMA Microfluidic Chips”; Analytical letters; 2005, 38: 1127-36
2. J.H. Li, D. Chen*, J. Zhang, J. Liu, J. Zhu;“An alternative method for SU-8 removal using PDMS technique”; Chinese J. of Semiconductors , 2005, 26(5): 899-903)
3. G. Chen, J.H. Li, S. Qu, D. Chen, P.Y. Yang; “Low temperature bonding of poly(methyl methacrylate) electrophoresis microchips by in situ polymerization” J. Chromatography A, 2005, 1094 (1-2): 138-147
4. H.W. Sun, J.Q. Liu, D. Chen, P. Gu; ”Optimization and experimentation of nanoimprint lithography based on FIB fabricated stamp”; Microelectronic Engineering, 2005, 82: 175-179
5. B. Yang, J.Q. Liu, D. Chen, B.C. Cai; “A High revolution speed noncontact ultrasonic motor driven by a non-symmetrical electrode”; Chin. Phys. Lett. 2005, 22(10): 2598-2600 (SCI 32, IF: 1.276)
6. J.H. Li, D. Chen*, J. Zhang, J.Q. Liu, J. Zhu; “Indirectly removal of SU-8 photoresist using PDMS technique”, Sensors and Actuators, A, 2006, 125: 586-589
7. X.M. Jing, D. Chen*, B.Z. Zhang, J.Q. Liu, J. Zhu; “A New Fabrication Method for 3D Multilayer Microstructure”; IEEE Review of Advances in Micro, Nano and Molecular Systems; 2006, 1: 263-264
8. Y. Chen, P.Y. Yang, J.H. Li, D. Chen, G. Chen; “ Electrophoresis microchips with sharp inlet tips, for contactless conductivity detection, fabricated by in-situ surface polymerization”; Analytical and Bioanalytical Chemistry, 2006, 384(3): 683-691
9. G. Chen, H.M. Bao, J.H. Li, D. Chen; “Fabrication of poly(dimethylsiloxane)-based capillary electrophoresis microchips using epoxy templates”; Microchimica Acta, 2006, 153(3-4): 151-158
10. S. Qu, X.H. Chen, D. Chen, P.Y. Yang, G. Chen; “Poly(methyl methacrylate) CE microchips replicated from poly(dimethylsiloxane) templates for the determination of cations”; Electrophoresis, 2006, 27(24): 4910 – 4918
11. H.B. Fang, J.Q. Liu, Z. Xu, L. Dong, D. Chen, B. Cai, Y. Liu, “A MEMS-based piezoelectric power generator for low frequency vibration energy harvesting”; Chin. Phys. Lett.; 2006, 23(3): 732-734,
12. H.B. Fang, J.Q. Liu, Z. Xu, L. Dong, D. Chen, B.C. Cai, Y. Liu; “Fabrication and performance of MEMS-based piezoelectric power generator for vibration energy harvesting”; Microelectronics Journal, 2006, 37: 1280-1284
13. H.W. Sun, J.Q. Liu, D. Chen, P. Gu; “A Novel Method to Mass-produce PDMS Stamps Based on Nanoimprint”; High technology letters, 2006, 12(3): 231-234
14. B. Yang, J.Q. Liu, D. Chen, B.C. Cai; “Theoretical and experimental research on a disk-type non-contact ultrasonic motor“; Ultrasonics. 2006, 44(3): 238-243
15. B. Yang, J.Q. Liu, D. Chen, W. Zhou, B.C. Cai; “Experimental study of noncontact ultrasonic motor with non-symmetrical electrode”; Chinese Physics, 2006, 15(2): 454
16. P. Gu, J.Q. Liu, H.W. Sun, D. Chen; “The design, fabrication, and low-cost replication of a new type of micro-nano grating for DWDM”; Microwave and Optical Technology Letters, 2006, 48(8): 1504-1507
17. J.Q. Liu, H.W. Sun, L.H. Li and D. Chen; “A novel method to fabricate complex three-dimensional microstructures”; Microsystem Technologies, 2006, 12: 786–789
18. X.M. Jing, D. Chen*, D. Fang, C. Huang, J. Liu, X. Chen; “Multi-layer microstructure fabrication by combining bulk silicon micromachining and UV-LIGA technology”; Microelectronics Journal, 2007, 38: 120–124
19. X.M. Jing, D. Chen*, C. Huang, X. Chen, J.Q. Liu, J. Zhu; “Complex microstructure fabrication by integrating silicon anisotropic etching and UV-LIGA technology”; High technology letters 2007, 13(4): 369-372
20. W.M. Zhang, G. Meng, D. Chen, “Stability, nonlinearity and reliability of electrostatically actuated MEMS devices”; Sensors, 2007, 7(5): 760-796
21. X.M. Jing, G. Engelmann, D. Chen*, J. Wolf, O. Ehrmann, H. Reichl; “Profile of the wafer level ECD gold bumps under variable parameters”; Journal of Materials Science: Materials in Electronics, 2008, 19(6): 563-568
22. C. Huang, D. Chen*, W.J. Wei, X.M. Jing, X. Chen, J.Q. Liu, J. Zhu , Z.Y. Wei, H.Q. Li; “A Compact Wide Band Filter Based on the Left Handed Material Theory”; Microelectronic Engineering, 2008, 85(10): 2183-2186
23. H.W. Sun, J.Q. Liu, P. Gu, D. Chen; “Anti-sticking treatment for a nanoimprint stamp”; Applied Surface Science; 2008, 254: 2955–2959
24. J.Q. Liu, H.B. Fang, Z.Y. Xu, X.H. Mao, X.C. Shen, D. Chen, H. Liao and B.C. Cai; “A MEMS-based piezoelectric power generator array for vibration energy harvesting”; Microelectronics Journal 2008, 39(5): 802-806
25. W.M. Zhang, G. Meng, D. Chen, J.B. Zhou, J.Y. Chen, “Nonlinear dynamics of a rub-impact micro-rotor system with scale-dependent friction model”; Journal of Sound and Vibration, 2008, 309: 756-777
26. W.M. Zhang, G. Meng, H. Huang, J.B. Zhou, J.Y. Chen and D. Chen; "Characteristics analysis and dynamic responses of micro-gas-lubricated journal bearings with a new slip model” J. Phys. D: Appl. Phys.; 2008 (41): 155305
27. C. Huang, D. Chen*, X. Chen, J.Q. Liu, X.M. Jing, J. Zhu, W.J. Wei, Z.Y. Wei, H.Q. Li; “A metamaterial directional antenna fabricated using MEMS Technique”; Chinese J. of Sensors and Actuators, 2008, 21(3): 533-535
28. X.M. Jing, D. Chen*, C. Huang, X. Chen, J.Q. Liu, G. Engelmann; “Fine pitch ECD Gold Bumping towards future demands”; J. of Functional Materials and Devices, 2008, 14(1): 158-162
29. G. Meng, W. M. Zhang, H. Huang, J. B. Zhou, D. Chen. Micro-rotor dynamics for micro-electro-mechanical systems (MEMS). Chaos, Solitons and Fractals, 2009, 40(2): 538-562.
30. C. Huang, D. Chen*, W.J. Wei, et. al;“Compact Band Reject Filter for Micro Electromechanical Systems”; Optics and Precision Engineering, 2009, 17(6):1244-50
31. C. Huang, D. Chen*, S. Leidich, T. Gessner; ?Compact Meta-material Transmission Line Balun Based on Meander Lines Structure and MEMS Technology”; Microelectronic Engineering, 2010, 87: 584–587
32. X.M. Jing, D. Chen*, C. Huang, X. Chen, J.M. Miao, J.Q. Liu and J. Zhu; “Elastic MEMS probe card based on PDMS"; Journal of Micromechanics and Microengineering, 2010, 20(5): 055038,
33. X.M. Jing, D. Chen*, X. Chen, J. Miao, J.Q. Liu and J. Zhu; "Design and fabrication of a micromachined bi-layer cantilever probe card"; Journal of Micro-Nanolithography, MEMS, and MOEMS (JM3), 2010, 9(4): 043005
34. H.W. Sun, G.G. Liu, S.M. Lin, J.Q. Liu, and D. Chen; “Focused ion beam–based nanoimprint stamp for replicating micro/nanostructures under low temperature”; J. Micro/Nanolith. MEMS MOEMS 2010, 9: 033005
35. J.D. Chen, D. Chen*, T. Yuan, X. Chen;”Microfluidic PCR Chips”; Nano Biomedicine and Engineering, 2011, 3(4): 203-210
36. J.D. Chen, D. Chen*, T. Yuan, X. Chen; ”A multi-frequency sandwich type electromagnetic vibration energy harvester”; Applied Physics Letters, 2012, 100: 213509
37. H.X Du, Z.G. Wang, Z.L. Yang, D. Chen, J.D. Chen and R.J. Hu; “Separation of circulating cancer cells by unique microfluidic chip in colorectal cancer”; Oncology Research, 2012, 19 (10-11): 487-500
38. J. Zhu, Y. Cao, Y. Li, X. Chen, D. Chen; “Integrating process and novel sacrificial layer fabricating technique based on diluted SU-8 resist”; Microelectronic Engineering 2012, 93: 56–60,
39. J. Zhu, Q. Shen, Y. Cao, H. Wang, X. Chen, D. Chen; “Characterization of out-of-plane cone metal microneedles and the function of transdermal delivery”; Microsyst Technol, 2013, 19: 617–621
40. W.M. Zhang, G. Meng, Z.K. Peng, D. Chen, “Coupled nonlinear effects of random surface roughness and rarefaction on slip flow in ultra-thin film gas bearing lubrication”; Journal of Tribology, 2012, 134(2): 024502
41. X.S. Wang, D.P. Yang, P. Huang, M. Li, C. Li, D. Chen and D.X. Cui; “Hierarchically assembled Au microspheres and sea urchin-like architectures: formation mechanism and SERS study”; Nanoscale; 2012, 4, 7766-7772
42. J.D. Chen, D. Chen*, Y. Xie, T. Yuan and X. Chen, “Progress of Micro?fluidics for Biology and Medicine”, Nano-Micro Lett. 2013, 5(1): 66-80.
43. J.D. Chen, D. Chen*, T. Yuan, Y. Xie, and X. Chen; “A microfluidic chip for direct and rapid trapping of white blood cells from whole blood”; Biomicrofluidics, 2013, 7, 034106
44. T. Yuan, D. Chen*, J.D. Chen, H.L. Fu, S. Kurth, T. Otto, T. Gessner; “Design, fabrication and characterization of MEMS probe card for fine pitch IC testing”; Sensors & Actuators: A-Physical; 2013, 204: 67– 73
45. C.Y. Hu, D.P. Yang, Z.H. Wang, P. Huang, X.S. Wang, D. Chen, D.X. Cui, M. Yang, N.Q. Jia; “Bio-mimetically synthesized Ag@BSA microspheres as a novel electrochemical biosensing interface for sensitive detection of tumor cells”; Biosensors & Bioelectronics 2013, 41: 656–662
46. J. Zhu, Y. Cao. H. Wang, Y.G. Li, X. Chen, D. Chen; ”Fabricating Process of Hollow out-of-plane Ni Microneedle Array and Property of the Integrated Microfluidic Device”; J. Micro/Nanolith. MEMS MOEMS, in press
47. W. Hu, H.T. Liu, C. Hu, S.G. Wang, D. Chen, J.Q. Mo, Q.H. Liang; “ Vision-based force measurement using pseudo-zernike moment invariants”; Measurement, 2013, 46(10): 4293-4305
48. T. Yuan, D. Chen*, J.D. Chen, X. Chen, X.W. Wang and B.L. Lu; “A novel MEMS elastic-based dry electrode for electroencephalography measurement”; Microsyst Technol. [J]. 2014, 20(6): 1125-1129
49. J.D. Chen, D. Chen*, T. Yuan, et al.; “Microfluidic chips for cells capture using 3D hydrodynamic structures array”; Microsystem Technologies, 2014, 20: 485–491
50. J.D. Chen, D. Chen*, T. Yuan, X. Chen, Y. X, H.L. Fu, D.X. Cui, X.D. Fan and M.K. Khaing Oo; “Blood plasma separation microfluidic chip with gradual filtration”; Microelectronic Engineering, in press
51. X. Zhi, M. Deng, H. Yang, G. Gao, K. Wang, H.L. Fu, Y.X. Zhang, D. Chen, D.X. Cui; “A novel HBV genotypes detecting system combined with microfluidic chip, loop-mediated isothermal amplification and GMR sensors”; Biosensors and Bioelectronics 2014, 54: 372–377


Authorized Patents
1. J.C. Ren,L. Chen,D. Chen;“Fabrication methods of silicon rubber –glass permanent bonding microfluidic analysis chip”; No.: ZL 02 1 45102.8;Date of application:Nov. 7, 2002, Date of authorization: Nov. 17, 2004
2. J.Q. Liu,D. Chen;“Fabrication methods of spinneret based on lithography”; No: ZL 03 1 29624.6, Date of application:July 3, 2003, Date of authorization:;Mar. 30, 2005
3. J.H. Li, D. Chen, et al.;“Packaging methods of plastic microfluidic analysis chip”; No.: ZL 2004 1 0016231.8,Date of application:Feb. 12, 2004; Date of authorization: Aug. 23, 2006
4. H. Wang, X.L. Zhao, G.F. Ding, D. Chen, et al.;“Methods to enhance bonding strength of laminated micro devices of nickel or nickel alloy”; No.: ZL 200510024929.9, Date of application:Apr. 7, 2005,Date of authorization:;May 14, 2008
5. X.M. Jing, D. Chen et al.;“Simply supported beam MEMS probe card and its fabrication method”; No.: ZL 200610117283.3,Date of application:Oct. 19, 2006, Date of authorization:;Dec. 24, 2008
6. J. Zhu, S.H. Jia, D. Chen et. al; “Fabrication method of micro needles based on multi layer microfabrication technique”;No.: ZL 200610025467.7,Date of application:Apr. 6, 2006,Date of authorization:;Dec. 12, 2008
7. D. Chen, X.M. Jing, et al.;“Fabrication method of MEMS probe card based on elastic substrate”; No. ZL 200710042311.4,Date of application:Jun. 21, 2007,Date of authorization::May 13, 2009
8. J.Q. Liu, B. Yang, D. Chen; “Micro machine gyroscope based on acoustic suspending”; No.: ZL 200510028687.0, Date of application: Aug. 11, 2005, Date of authorization::jun. 3, 2009
9. W.M. Zhang, G. Meng, H.G. Li, D. Chen, et al.;“Laser measurement method of non-contact micro rotor vibration displacement”; No.: ZL 200610026843.4,Date of application:May 25, 2006,Date of authorization: Aug. 5, 2009
10. D. Chen,S.W. Liu et al.; “Fabrication method of bio-electrode array based on flexible substrate”; No.: ZL 200710047400.8,Date of application:Oct. 25, 2007,Date of authorization::Oct. 21, 2009
11. D. Chen, X.M. Jing et al. “Metal- Silicon combined cantilever beam MEMS probe card and its fabrication method”;No.: ZL200810042788.7,Date of application:Sept. 11, 2008, Date of authorization::Dec. 8, 2010
12. X. Chen,X.L. Xiao, P. Wang, Y.Q. Wang, D. Chen;“Fabrication method of hot embossing mould based on nanomaterials modified PDMS”;No.: ZL200910049007.1;Date of application:Apr. 9, 2009, Date of authorization::Feb. 2, 2011
13. D. Chen,C. Huang, et al.; “RF-MEMS switch and its fabrication method based on thermal actuated amplifying”;No.:ZL200910309143.X;Date of application:Oct. 30, 2009, Date of authorization: Nov. 28, 2012
14. D. Chen, M. Xu, et al.; “Fabrication method of flexible substrate bio-microelectrode array based on substrate patterning”;No.: ZL200910309599.6;Date of application:Nov. 12, 2009, Date of authorization: Jun. 1, 2011
15. D. Chen, C. Wu, et al.; “Fabrication method of electroencephalogram dry electrode array based on flexible substrate”;