Instrument Science and Engineering

  • Name:CHEN, Di
  • Title:Professor Dr.
  • Office:micro/nano Sci. & Eng. 2-218
  • Office Phone:021-34206992
  • Website:

Research Field

1. MEMS fabrication technique
2. microfluidics
3. Bio-MEMS


1986 Diploma Chemist, Department of Chemistry, University of Hamburg, Germany
1990 Doctor of Natural Science, Department of Chemistry, University of Hamburg, Germany

Work experience

05/1990 – 12/1992 Post doctoral researcher, MicroParts Company, Germany
01/1993 – 12/1995 Associate Professor, Department of Chemistry, Shanghai Jiao Tong University, China
01/1996 – present Professor, Research Institute of Micro/nano Science & Technology, Shanghai Jiao Tong University, China


1. 863: Study on key technique of artificial retina (12/1/2006 – 11/30/2008) PI
2. NSFC: Integrated probe card based on MEMS micro spring (1/1/2006 – 12/31/2008) PI
3. SIEMENS: Micro harverster from vibration energy (11/2008-12/2009) PI
4. 863: Non silicon surface microfabrication and flexible substrate technique (12/1/2006 – 11/30/2008) Co-PI
5. NSFC: Measurement of vision micro force based on blurred pictures and force information (1/2009-12/2012) Co-PI
6. Science and Technology Commission of Shanghai Municipality: Study on key technology of wireless brain dry electrode cap and driver alertness monitoring system (10/2009-10/2011) Co-PI
7. 973: Key science using nanotechnology to solve gastric cancer early detection, (2010-2014) Co-PI
8. Institute of Shanghai Aerospace: High aspect ratio non-silicon microfabrication technique, (2012-2014) PI
9. SJTU-UM Foundation: Soft Robotics Movement Sensing and Feedback for Preventing Falls in Older Adults, (2014-2016) PI
10. Science and Technology commission of Shanghai: Research on the key technology of single cell manipulation for circulating tumor cells, (2015-2018), PI
National Key research and development: Research of large area precise temperature control module and
nucleic acid amplification chip (2016-2018) PI

Awards and Honors

1. China: Second prize of Technology Invention (2008) (Ranking 4)
2. Shanghai: First prize of Technology Invention (2007) (Ranking 3)
3. Ministry of Education: Second Prize of Natural Science (2008) (Ranking 3)
4. Ministry of Education: First Prize of Natural Science (2014) (Ranking 4)
5. Shanghai: First prize of Technology Invention (2016) (Ranking 9)


1. Science and Engineering of Microelectronic Fabrication (in English)
2. Internet of things and smart cities


1. S.J. Lin, J.K. Xu, X. Zhi, D. Chen*, et al.; Design and Fabrication of a Stretchable Circuit Board for Wireless Posture Measurement. IEEE Electron Device Letters, 2017, 38(3): 399-402
2. Y. Xie, D. Chen* S.J. Lin; “Microfluidic Electrochemical Detection Techniques of Cancer Biomarkers”; Nano Biomed. Eng., 2017, 9(1): 57-71
3. Y. Xie, D. Chen* S.J. Lin, Z.G. Wang and D.X. Cui; A robust and easy integration plasma separation chip by gravitational sedimentation of blood cells filling-in high-aspect-ratio weir structure. RSC Advances, 2016, 6: 30722 - 30727
4. X. Zhi, L. Lin, D. Chen*; Surface Enhanced Raman Scattering (SERS): From Fundamental Mechanism to Bio-Analytics Tools. Nano Biomedicine and Engineering, 2016, 8(4): 297-305
5. J. Wu, K. Tao, Y. Guo, Z. Li, X. Wang, Z. Luo, D. Chen, J. Miao* and L.K. Norford, "3D Chemically Modified Graphene Hydrogel for Fast, Highly Sensitive and Selective Gas Sensor", Advanced Science, 2016, 3: 1600319
6. Y.S. Chen, Y. Zhang, F. Pan, J. Liu, K. Wang, C.L. Zhang, S.L. Cheng, L. Lu, W. Zhang, Z. Zhang, X. Zhi, Q. Zhang, G. Alfranca, J.M. de la Fuente, D. Chen, D.X. Cui; “Breath Analysis Based on Surface-Enhanced Raman Scattering Sensors Distinguishes Early and Advanced Gastric Cancer Patients from Healthy Persons”; ACS Nano, 2016, 10(9): 8169-8179,
7. C.C. Meng, X. Zhi, C. Li, C.F. Li, Z.Y. Chen, X.S. Qiu, C. Ding, L.J. Ma, H.M. Lu, D. Chen, G.Q. Liu, D.X. Cui; “Graphene Oxides Decorated with Carnosine as an Adjuvant To Modulate Innate Immune and Improve Adaptive Immunity in Vivo”; ACS Nano, 2016, 10(2): 2203-2213,
8. W.Q. You, G.W. Tan, N.Q. Sheng, J.F. Gong, J. Yan, D. Chen, H.Z. Zhang, Z.G. Wang; “Downregulation of myosin VI reduced cell growth and increased apoptosis in human colorectal cancer”; Acta Biochimica et Biophysica Sinica, 2016, 48(5): 430-436,
9. Y. Xie, X. Zhi, H.C. Su, K. Wang, Z. Yan, N.Y. He, J.P. Zhang, D. Chen*, D.X. Cui*; A novel electrochemical microfluidic chip combined with multiple biomarkers for early diagnosis of gastric cancer, Nanoscale Research Letters, 2015, 10: 477, DOI 10.1186/s11671-015-1153-3
10. J.D. Chen, D. Chen*, Y. Xie, X. Chen, K. Wang, D.X. Cui, H.X. Du, and Z.G. Wang; “Bubble generation and mechanism in polydimethylsiloxane based polymerase chain reaction chip”; Applied Physics Letters, 2015, 106: 053507
11. S.J. Lin, D. Chen*, Y. Xie, B.B. Lin, Q. Wei, F. Pan, D.X. Cui; Single Cell Manipulation Technology, Nano Biomed. & Eng., 2015, 7(3): 75 - 91.
12. J.D. Chen, D. Chen*, T. Yuan, X. Chen, Y. Xie, H.L. Fu, D.X. Cui, X.D. Fan and M.K. Khaing Oo; “Blood plasma separation microfluidic chip with gradual filtration”; Microelectronic Engineering, 2014, 128: 36 - 41
13. J.D. Chen, D. Chen*, T. Yuan, X. Chen, J. Zhu, A. Morschhauser, J. Nestler, T. Otto, T. Gessner; “Microfluidic chips for cells capture using 3D hydrodynamic structures array”; Microsystem Technologies, 2014, 20: 485 - 491,
14. T. Yuan, D. Chen*, J.D. Chen, X. Chen, X.W. Wang and B.L. Lu; “A novel MEMS elastic-based dry electrode for electroencephalography measurement”; Microsyst Technol. [J]. 2014, 20(6): 1125 - 1129;
15. W.P. Wu, H. Yi, D. Chen, R.S. Lu, T. Yuan, J.D. Chen, Z.H. Ni; “The design and fabrication of a low-field NMR probe based on a multilayer planar microcoil”; Microsystem Technologies, 2014, 20(3): 419 - 425,
16. X. Zhi, M. Deng, H. Yang, G. Gao, K. Wang, H.L. Fu, Y.X. Zhang, D. Chen, D.X. Cui; “A novel HBV genotypes detecting system combined with microfluidic chip, loop-mediated isothermal amplification and GMR sensors”; Biosensors and Bioelectronics 2014, 54: 372 - 377
17. W. Hu, H.T. Liu, C. Hu, S.G. Wang, D. Chen, J.Q. Mo, Q.H. Liang; “ Vision-based force measurement using pseudo-Zernike moment invariants”; Measurement, 2013, 46(10): 4293-4305.
18. J. Zhu, Q. Shen, Y. Cao, H. Wang, X. Chen, D. Chen; “Characterization of out-of-plane cone metal microneedles and the function of transdermal delivery”; Microsyst Technol, 2013, 19: 617 - 621,
19. J. Zhu, Y. Cao. H. Wang, Y.G. Li, X. Chen, D. Chen; ”Fabricating Process of Hollow out-of-plane Ni Microneedle Array and Property of the Integrated Microfluidic Device”; J. Micro/Nanolith. MEMS MOEMS, 2013, 12(3): 033019,
20. C.Y. Hu, D.P. Yang, Z.H. Wang, P. Huang, X.S. Wang, D. Chen, D.X. Cui, M. Yang, N.Q. Jia; “Bio-mimetically synthesized Ag@BSA microspheres as a novel electrochemical biosensing interface for sensitive detection of tumor cells”; Biosensors & Bioelectronics 2013, 41: 656 - 662
21. J.D. Chen, D. Chen*, T. Yuan, X. Chen; ”A multi-frequency sandwich type electromagnetic vibration energy harvester”; Applied Physics Letters, 2012, 100: 213509
22. X.S. Wang, D.P. Yang, P. Huang, M. Li, C. Li, D. Chen and D.X. Cui; “Hierarchically assembled Au microspheres and sea urchin-like architectures: formation mechanism and SERS study”; Nanoscale; 2012, 4, 7766-7772;
23. W.M. Zhang, G. Meng, Z.K. Peng, D. Chen, “Coupled nonlinear effects of random surface roughness and rarefaction on slip flow in ultra-thin film gas bearing lubrication”; Journal of Tribology, 2012, 134(2): 024502
24. J. Zhu, Y. Cao, Y. Li, X. Chen, D. Chen; “Integrating process and novel sacrificial layer fabricating technique based on diluted SU-8 resist”; Microelectronic Engineering 2012, 93: 56 - 60
25. H.X. Du, Z.G. Wang, Z.L. Yang, D. Chen, J.D. Chen and R.J. Hu; “Separation of circulating cancer cells by unique microfluidic chip in colorectal cancer”; Oncology Research, 2012, 19 (10-11): 487 - 500
26. J.D. Chen, D. Chen*, T. Yuan, X. Chen; “Microfluidic PCR Chips”; Nano Biomedicine and Engineering, 2011, 3(4): 203 - 210
27. X.M. Jing, D. Chen*, X. Chen, J. Miao, J.Q. Liu and J. Zhu; "Design and fabrication of a micromachined bi-layer cantilever probe card"; Journal of Micro-Nanolithography, MEMS, and MOEMS (JM3), 2010, 9(4): 043005
28. X.M. Jing, D. Chen*, C. Huang, X. Chen, J.M. Miao, J.Q. Liu and J. Zhu; “Elastic MEMS probe card based on PDMS"; Journal of Micromechanics and Microengineering, 2010, 20(5): 055038 (7pp)
29. C. Huang, D. Chen*, S. Leidich, T. Gessner; “Compact Meta-material Transmission Line Balun Based on Meander Lines Structure and MEMS Technology”; Microelectronic Engineering, 2010, 87: 584 - 587
30. H.W. Sun, G.G. Liu, S.M. Lin, J.Q. Liu, and D. Chen; “Focused ion beam–based nanoimprint stamp for replicating micro/nanostructures under low temperature”; J. Micro/Nanolith. MEMS MOEMS 2010, 9: 033005
31. C. Huang, D. Chen*, W.J. Wei, X.M. Jing, X. Chen, J.Q. Liu, J. Zhu , Z.Y. Wei, H.Q. Li; “A Compact Wide Band Filter Based on the Left Handed Material Theory”; Microelectronic Engineering, 2008, 85(10): 2183 - 2186
32. X.M. Jing, G. Engelmann, D. Chen*, J. Wolf, O. Ehrmann, H. Reichl; “Profile of the wafer level ECD gold bumps under variable parameters”; Journal of Materials Science: Materials in Electronics, 2008, 19(6): 563 - 568
33. J.Q. Liu, H.B. Fang, Z.Y. Xu, X.H. Mao, X.C. Shen, D. Chen, H. Liao and B.C. Cai; “A MEMS-based piezoelectric power generator array for vibration energy harvesting”; Microelectronics Journal 2008, 39(5): 802 - 806
34. H.W. Sun, J.Q. Liu, P. Gu, D. Chen; “Anti-sticking treatment for a nanoimprint stamp”; Applied Surface Science; 2008, 254: 2955 - 2959
35. W.M. Zhang, G. Meng, H. Huang, J.B. Zhou, J.Y. Chen and D. Chen; "Characteristics analysis and dynamic responses of micro-gas-lubricated journal bearings with a new slip model” J. Phys. D: Appl. Phys.; 2008 (41): 155305 (16pp)
36. W.M. Zhang, G. Meng, D. Chen, J.B. Zhou, J.Y. Chen, “Nonlinear dynamics of a rub-impact micro-rotor system with scale-dependent friction model”; Journal of Sound and Vibration, 2008, 309: 756 - 777
37. X.M. Jing, D. Chen*, D. Fang, C. Huang, J. Liu, X. Chen; “Multi-layer microstructure fabrication by combining bulk silicon micromachining and UV-LIGA technology”; Microelectronics Journal, 2007, 38: 120 - 124
38. X.M. Jing, D. Chen*, C. Huang, X. Chen, J.Q. Liu, J. Zhu; “Complex microstructure fabrication by integrating silicon anisotropic etching and UV-LIGA technology”; High technology letters 2007, 13(4): 369 - 372
39. W.M. Zhang, G. Meng, D. Chen, “Stability, nonlinearity and reliability of electrostatically actuated MEMS devices”; Sensors, 2007, 7(5): 760 - 796,
40. J.H. Li, D. Chen*, J. Zhang, J.Q. Liu, J. Zhu; “Indirectly removal of SU-8 photoresist using PDMS technique”, Sensors and Actuators, A, 2006, 125: 586 - 589
41. S. Qu, X.H. Chen, D. Chen, P.Y. Yang, G. Chen; “Poly(methyl methacrylate) CE microchips replicated from poly(dimethylsiloxane) templates for the determination of cations”; Electrophoresis, 2006, 27(24): 4910 - 4918
42. G. Chen, H.M. Bao, J.H. Li, D. Chen; “Fabrication of poly(dimethylsiloxane)-based capillary electrophoresis microchips using epoxy templates”; Microchimica Acta, 2006, 153(3-4): 151 - 158
43. Y. Chen, P.Y. Yang, J.H. Li, D. Chen, G. Chen; “ Electrophoresis microchips with sharp inlet tips, for contactless conductivity detection, fabricated by in-situ surface polymerization”; Analytical and Bioanalytical Chemistry, 2006, 384(3): 683 - 691
44. J.Q. Liu, H.W. Sun, L.H. Li and D. Chen; “A novel method to fabricate complex three-dimensional microstructures”; Microsystem Technologies, 2006, 12: 786 - 789
45. P. Gu, J.Q. Liu, H.W. Sun, D. Chen; “The design, fabrication, and low-cost replication of a new type of micro-nano grating for DWDM”; Microwave and Optical Technology Letters, 2006, 48(8): 1504 - 1507
46. B. Yang, J.Q. Liu, D. Chen, W. Zhou, B.C. Cai; “Experimental study of noncontact ultrasonic motor with non-symmetrical electrode”; Chinese Physics, 2006, 15(2): 454
47. B. Yang, J.Q. Liu, D. Chen, B.C. Cai; “Theoretical and experimental research on a disk-type non-contact ultrasonic motor“; Ultrasonics. 2006, 44(3): 238 - 243
48. H.W. Sun, J.Q. Liu, D. Chen, P. Gu; “A Novel Method to Mass-produce PDMS Stamps Based on Nanoimprint”; High technology letters, 2006, 12(3): 231 - 234


Authorized Patents
1. J.C. Ren,L. Chen,D. Chen;“Fabrication methods of silicon rubber –glass permanent bonding microfluidic analysis chip”; No.: ZL 02 1 45102.8;Date of application:Nov. 7, 2002, Date of authorization: Nov. 17, 2004
2. J.Q. Liu,D. Chen;“Fabrication methods of spinneret based on lithography”; No: ZL 03 1 29624.6, Date of application:July 3, 2003, Date of authorization:;Mar. 30, 2005
3. J.H. Li, D. Chen, et al.;“Packaging methods of plastic microfluidic analysis chip”; No.: ZL 2004 1 0016231.8,Date of application:Feb. 12, 2004; Date of authorization: Aug. 23, 2006
4. H. Wang, X.L. Zhao, G.F. Ding, D. Chen, et al.;“Methods to enhance bonding strength of laminated micro devices of nickel or nickel alloy”; No.: ZL 200510024929.9, Date of application:Apr. 7, 2005,Date of authorization:;May 14, 2008
5. X.M. Jing, D. Chen et al.;“Simply supported beam MEMS probe card and its fabrication method”; No.: ZL 200610117283.3,Date of application:Oct. 19, 2006, Date of authorization:;Dec. 24, 2008
6. J. Zhu, S.H. Jia, D. Chen et. al; “Fabrication method of micro needles based on multi layer microfabrication technique”;No.: ZL 200610025467.7,Date of application:Apr. 6, 2006,Date of authorization:;Dec. 12, 2008
7. D. Chen, X.M. Jing, et al.;“Fabrication method of MEMS probe card based on elastic substrate”; No. ZL 200710042311.4,Date of application:Jun. 21, 2007,Date of authorization::May 13, 2009
8. J.Q. Liu, B. Yang, D. Chen; “Micro machine gyroscope based on acoustic suspending”; No.: ZL 200510028687.0, Date of application: Aug. 11, 2005, Date of authorization::jun. 3, 2009
9. W.M. Zhang, G. Meng, H.G. Li, D. Chen, et al.;“Laser measurement method of non-contact micro rotor vibration displacement”; No.: ZL 200610026843.4,Date of application:May 25, 2006,Date of authorization: Aug. 5, 2009
10. D. Chen,S.W. Liu et al.; “Fabrication method of bio-electrode array based on flexible substrate”; No.: ZL 200710047400.8,Date of application:Oct. 25, 2007,Date of authorization::Oct. 21, 2009
11. D. Chen, X.M. Jing et al. “Metal- Silicon combined cantilever beam MEMS probe card and its fabrication method”;No.: ZL200810042788.7,Date of application:Sept. 11, 2008, Date of authorization::Dec. 8, 2010
12. X. Chen,X.L. Xiao, P. Wang, Y.Q. Wang, D. Chen;“Fabrication method of hot embossing mould based on nanomaterials modified PDMS”;No.: ZL200910049007.1;Date of application:Apr. 9, 2009, Date of authorization::Feb. 2, 2011
13. D. Chen,C. Huang, et al.; “RF-MEMS switch and its fabrication method based on thermal actuated amplifying”;No.:ZL200910309143.X;Date of application:Oct. 30, 2009, Date of authorization: Nov. 28, 2012
14. D. Chen, M. Xu, et al.; “Fabrication method of flexible substrate bio-microelectrode array based on substrate patterning”;No.: ZL200910309599.6;Date of application:Nov. 12, 2009, Date of authorization: Jun. 1, 2011
15. D. Chen, C. Wu, et al.; “Fabrication method of electroencephalogram dry electrode array based on flexible substrate”;