Micro-Nano Electronics

  • Name:Zhuoqing YANG
  • Title:Full Professor (PhD Supervisor)
  • Office:Room 310, No.2 of Experimental Building
  • Office Phone:+86-21-34206687
  • Email:yzhuoqing@sjtu.edu.cn
  • Website:https://www.researchgate.net/profile/Zhuoqing_Yang

Research Field

Micro/Nano sensors and actuators(Especially, MEMS inertial switch);
3D fabrications on the surface of flexible fibers/flexible skin;
MEMS/NEMS for biomedical applications;
Multi-Elements Compatible MEMS Process (MECMPs);
Near-zero power sensors for IoT applications.


Shanghai Jiao Tong University (Ph.D.): Apr 2006 – Mar 2010;
Harbin Engineering University (M.Sci.): Sep 2003 – Dec 2005;
Harbin Engineering University (B.Eng.): Sep 1999 – Jul 2003;

Work experience

1. Shanghai Jiao Tong University (SJTU),Shanghai, China (Dec 2018 – Present)
Details: As a Full Professor
Department: Natl Key Lab Sci & Technol Micro Nano Fabricat
2. Shanghai Jiao Tong University (SJTU),Shanghai, China (Dec 2013 – Nov 2018)
Details: As an Associate Professor
Department: Natl Key Lab Sci & Technol Micro Nano Fabricat
3. National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Japan (Nov 2011 – Nov 2013)
Details: As a JSPS Fellow
Project: “Continuous micropatterning technology of fibers for green applications” (Supported by the Japan Society for the Promotion of Science)
4. Shanghai Jiao Tong University (SJTU), Shanghai, China (Jun 2010 – Nov 2013)
Details: As an Assistant Professor
Department: Natl Key Lab Sci & Technol Micro Nano Fabricat


Projects (Selected):
NSFC:Ultra-thin Single Optical Fiber Medical Endoscope Utilizing High-order Resonant Modal for Larger Scanning Angle. (1/1/2016-12/31/2019) PI;
Hi-Tech Research and Development Program of China—“863 Program” sub-project(2015AA042701).(1/3/2015-1/3/2018) PI;
Advanced Research Ministry of Education Joint Foundation (6141A02033403).(1/1/2016-31/12/2017) PI;
SJTU-SMC Young Scholar Program (16X100080044).(1/1/2016-31/12/2018) PI;
NSFC:Design and Contact-Enhanced Mechanism of a Multi-Directional Vibration Threshold Sensor with Nano/Micro Compliant Electrodes. (1/1/2013-12/31/2015) PI;
Foundation of Natl Key Lab Sci & Technol Micro Nano Fabricat: MEMS 3D Through-Glass-Via (TGV) Integration and Filling Thechnology. (1/7/2011-30/6/2013) PI;
Shanghai Pujiang Program (14PJ1405800):(1/6/2014-1/6/2016) PI;
NSFC:Study on Integrated Nonlinear Broadband Electromagnetic Vibration Energy Harvester. (1/1/2011-31/12/2013) Co-PI.
Research Contents:
1. Proposed several novel designs of contact-enhanced MEMS inertial switch (i.e., acceleration microswitch), which significantly prolong the witch-on time and reduce the bouncing effect; Developed a finite element model of the switch by ANSYS, CoventorWare or MATLAB/Simulink for simulating and optimizing the designs; Analyzed the squeeze film damping effect in the inertial switch with raised strips on the substrate; Fabricated the devices by the surface micromachining technology in the clean room; Packaged devices by epoxy adhesive bonding was characterized and evaluated using drop hammer experiment and vibration test.
2. Fabrication and characterization of superhydrophobic surface by electroplating regular rough micro-structures of metal nickel was done. According to Cassie-Baxter law, we proposed a method that the superhydrophobicy could be obtained on structured hydrophilic surface without any coating of low-surface-energy material. By controlling the parameters of cylinders (diameter/height/spacing) of electroplated nickel cylinder array, in the current our obtained the maximum contact angle (CA) between the array and the water droplet can be up to 155°.
3. Developed a programmable UV lithography system with multi-layer alignment for cylindrical substrates. By using this system various microstructures with different patterns can be fabricated on the capillary surface, and ±1um alignment precision can be realized. A home-made spray coating system is also developed for capillary substrates. A flexible implantable micro temperature sensor for hyperthermia application or other biomedical sensors could be designed and fabricated on the polymer capillary.

Awards and Honors

Shanghai Municipal Technological Invention Award (1st rank prize). Dec 2016
Best Paper Award of CSMNT2014. Aug 2015
Best Paper Award of JCK MEMS/NEMS2013 Int. Conf. held in Japan. Aug 2013
AM Scholarship of Shanghai International Cooperation Foundation. Sep 2009
"Weiquan WU" Graduate Scholarship of SJTU. Aug 2009
Outstanding Paper Award for Excellent Ph. D Candidate in MNRI, SJTU. Apr 2009
Outstanding Paper Award of Chinese Mechanical Engineering Society. Oct 2008
ANSYS-CHINA Ansys Advanced Training (Certificate No.230123). Jun – Aug 2006
“5. 4 Cup” Excellent Paper Award of HEU. Jul 2005
First-class, Second-class and Third-class Scholarships of HEU. 1999 – 2003


1. Advanced Process Technology of Integrated Circuits: Fall,48h/semester, Master Course;
2. Fabrication Technology of Integrated Circuits: Fall,54h/semester, Engineering Master Course;
3. Integrated Circuit and Microsystems Packaging:Spring,32h/semester, Bachelor Course.


Book Chapters:
[1] Zhuoqing Yang, and Yi Zhang, Lab-on-a-tube Surface Micromachining Technology, Chapter 5 of Thin Film Processes - Artifacts on Surface Phenomena and Technological Facets, Ed. Jagannathan Thirumalai, InTech Press, pp. 91-105, Print ISBN 978-953-51-3067-3.
[2] Zhuoqing Yang, Guifu Ding, Yan Wang and Xiaolin Zhao, A MEMS Inertial Switch Based on Non-silicon Surface Micromachining Technology, Chapter of Micro Electro Mechanical Systems, Ed. Qing-An Huang, Springer Nature Singapore Pte Ltd. Press, pp. 1-55, ISBN: 978-981-10-5946-9.
Selected Journal Publications:
[1] Shenyong Yang, Congchun Zhang, Zhuoqing Yang, Jinyuan Yao, Hong Wang, Guifu Ding. “Effect of nitrogen doping temperature on the resistance stability of ITO thin films,” Journal of Alloys and Compounds, vol. 778, pp. 90-96, 2019.
[2] Zhuoqing Yang, Jianhao Shi, Jinyuan Yao, Xiaojing Zhang, Guifu Ding and Xiaolin Zhao. “A Laterally Driven MEMS Inertial Switch With Double-Layer Suspended Springs for Improving Single-Axis Sensitivity”, IEEE Trans. Compon., Packag., Manuf. Technol., vol. 8, no. 10, pp. 1845-1854, 2018.
[3] Qiao Xu, Bo Dai, Yu Huang, Huansi Wang, Zhuoqing Yang, Kaimin Wang, Songlin Zhuang, Dawei Zhang. “Fabrication of polymer microlens array with controllable focal length by modifying surface wettability”, Optics Express, vol.26, pp. 4172-4182, 2018.
[4] Zhuoqing Yang, Jianhao Shi, Bin Sun, Jinyuan Yao, Guifu Ding, Renshi Sawada, “Fabrication of electromagnetically-driven tilted microcoil on polyimide capillary surface for potential single-fiber endoscope scanner application,” Micromachines, vol. 9, DOI: 10.3390/mi9020061, 2018.
[5] Qiu Xu, Bin Sun, Yigui Li, Xiaojian Xiang, Liyan Lai, Jian Li, Guifu Ding, Xiaolin Zhao, Zhuoqing Yang, “Design and characterization of an inertial microswitch with synchronous follow-up flexible compliant electrodes capable of extending contact duration,” Sensors and Actuators A: Physical, vol. 270, pp.34-45, 2018.
[6] Qiu Xu, Zhuoqing Yang, Yunnan Sun, Liyan Lai, Zhiyu Jin, Guifu Ding, Xiaolin Zhao, Jing Wang. “Shock-resistibility of MEMS-based inertial microswitch under reverse directional ultra-high g acceleration for IoT applications”, Scientific Reports, vol.7, 45512, 2017.
[7] Qiu Xu, Zhuoqing Yang, Bo Fu, Jianhua Li, Hao Wu, Qihuan Zhang, Yunna Sun, Guifu Ding, Xiaolin Zhao. “A surface-micromachining-based inertial micro-switch with compliant cantilever beam as movable electrode for enduring high shock and prolonging contact time”, Applied Surface Sciences, vol. 387, pp. 569-580, 2016.
[8] Qihuan Zhang, Zhuoqing Yang, Qiu Xu, Yang Wang, Guifu Ding, Xiaolin Zhao. “Design and fabrication of a laterally-driven inertial micro-switch with multi-directional constraint structures for lowering off-axis sensitivity”, Journal of Micromechanics and Microengineering, vol. 26, 055008(15pp), 2016.
[9] Qiu Xu, Zhuoqing Yang, Qihuan Zhang, Yunnan Sun, Yang Wang, Hong Wang, Guifu Ding, Xiaolin Zhao. “Simulation and characterization of a thin film Au/Ni micro hot bridge-wire ignition element under capacitor discharging”, International Journal of Thermal Sciences, vol. 102, pp. 100-110, 2016.
[10] Bo Wang, Jungsuk Song, Ping Cheng, Hong Wang, Zhuoqing Yang, Guifu Ding. “Patterning Ag film by a facile, efficient and environment-friendly way”, Micro & Nano Letters, vol. 11, pp. 469-471, 2016.
[11] Wenguo Chen, Zhuoqing Yang, Yan Wang, Guifu Ding, Hong Wang, Xiaolin Zhao. “Fabrication and characterization of a low-g inertial microswitch with flexible contact point and limit-block constraints”, IEEE/ASME Transactions on Mechatronics, vol. 21, pp. 963-972, 2016.
[12] Yang Wang, Zhuoqing Yang, Qiu Xu, Wenguo Chen, Guifu Ding, Xiaolin Zhao. “Design, simulation and characterization of a MEMS inertia switch with flexible CNTs/Cu composite array layer between electrodes for prolonging contact time”, Journal of Micromechanics and Microengineering, vol. 25, 085012(8pp), 2015.
[13] Zhuoqing Yang, Yi Zhang, Toshihiro Itoh, Ryutaro Maeda. “A novel MEMS compatible lab-on-a-tube technology”, Lab on a Chip, vol. 14, pp. 4604-4608, 2014.
[14] Wenguo Chen, Yongliang Wang, Yonghua Zhang, Ping Cheng, Yan Wang, Guifu Ding, Xiaolin Zhao, Zhuoqing Yang. “Fabrication of a novel contact-enhanced horizontal sensitive inertial micro-switch with electroplating nickel”, Microelectronics Engineering, vol. 127, pp. 21-27, 2014.
[15] Zhuoqing Yang, Yi Zhang, Toshihiro Itoh, Ryutaro Maeda. “Flexible implantable microtemperature sensor fabricated on polymer capillary by programmable UV lithography with multilayer alignment for biomedical applications”, IEEE/ASME Journal of Microelectromechanical Systems, vol. 23, No. 1, pp. 21-29, July, 2014.
[16] Zhuoqing Yang, Yi Zhang, Toshihiro Itoh, Ryutaro Maeda. “New fabrication method of three-electrode system on cylindrical capillary surface as a flexible implantable microneedle”, Surface Review and Letters, vol. 22, 1350027(8pp), 2013.
[17] Zhuoqing Yang, Bin Zhu, Wenguo Chen, etc. “Fabrication and characterization of a multidirectional-sensitive contact-enhanced inertial microswitch with an electrophoretic flexible composite fixed electrode”, Journal of Micromechanics and Microengineering, vol. 22, 045006(10pp), 2012.
[18] Qifa Liu, Yan Wang, Zhuoqing Yang, Haiquan Ding, Chang Liu, Guifu Ding, “Electrophoretic deposition of carbon nanotubes auxiliary layer for power saving in AC plasma display panels,” IEEE Transactions on Plasma Science, vol. 40, pp. 1110-1116, 2012.
[19] Peihong Wang, Huiting Liu, Xuhan Dai, Zhuoqing Yang, Zhongzhu Wang, Xiaolin Zhao, “Design, simulation, fabrication and characterization of a micro electromagnetic vibration energy harvester with sandwiched structure and air channel,” Microelectronics Journal, vol. 43, pp. 154-159, 2012.
[20] Guangyang Li, Xueping Li, Hong Wang, Zhuoqing Yang, Jinyuan Yao, Guifu Ding, “Fabrication and characterization of superhydrophobic surface by electroplating regular rough micro-structures of metal nickel,” Microelectronic Engineering, vol. 95, pp. 130-134, 2012.
[21] Zhuoqing Yang, Guifu Ding, Haogang Cai, etc. “A MEMS inertia switch with bridge-type elastic fixed electrode for long duration contact”, IEEE Transactions on Electron Devices, vol. 55, pp. 2492-2497, 2008.
[22] Haogang Cai, Zhuoqing Yang, etc. “Development of a novel MEMS inertial switch with compliant stationary electrode”, IEEE Sensors Journal, vol. 9, pp. 801-808, 2009.
Refereed Conference Presentations:
[1] Xinyue Chang, Zhiyu Jin, Yunna Sun, Yan Wang, Zhuoqing Yang and Guifu Ding. “An All-metal Hollow Microstructure for Pool-boiling Chip-integrated Cooling Based on Electroplating,” IEEE NEMS 2018, Apr. 22-26, Singapore. (Oral)
[2] Jianhao Shi, Hongfang Li, Bin Sun, Xiaolin Zhao, Guifu Ding and Zhuoqing Yang. “A Flexible Pressure Sensor Based on Low-Cost Electroplated-Ni Film Induced Cracking for Wearable Devices Application,” IEEE NEMS 2018, Apr. 22-26, Singapore. (Oral)
[3] Zhuoqing Yang, Jianhao Shi, Bin Sun, Congchun Zhang, Guifu Ding, and Xiaolin Zhao. “Non-Silicon Micro/Nano 3D Integrated Manufacturing Technology for Near-Zero-Power and Flexible MEMS Devices Applications,” 8th IEEE International Nanoelectronics Conference (IEEE INEC), Jan 03-05, 2018, Kuala Lumpur, Malaysia. (Invited Talk)
[4] Mengyuan Zhao, Zhuoqing Yang, Bin Sun, Bo Dai, Hua Liu, Jinyuan Yao, Xiaoxue Xu, Guifu Ding, Xiaolin Zhao. “A micro electromagnetically-driven scanner by 2-DOF second-order resonance to extend scanning scale for ultra-thin single-fiber endoscope application,” IEEE MEMS 2018, pp. 575-578, Belfast, UK.
[5] Zhuoqing Yang. “MEMS sensors and actuators based on 3D micro-fabrication technologies for wearable devices and IoT applications,” The 4th Int'l Conference on Semiconductor Physics and Devices (ICSPD 2017), Sep. 24-26, Suzhou, China (Keynote Speech)
[6] Qiu Xu, Zhuoqing Yang, Yunna Sun, Mengyuan Zhao, Jian Li, Guifu Ding, Xiaolin Zhao. “Shock-resistibility of inertial microswitch under reverse sensitive directional ultra-high G acceleration”, IEEE MEMS 2017, pp. 789-792, Las Vegas, NV, USA.
[7] Qiu Xu, Zhuoqing Yang, Yunnan Sun, Jiangbo Luo, Hongfang Li, Guifu Ding, Xiaolin Zhao, Jinyuan Yao, Jing Wang, “A novel inertial microswitch with synchronous follow-up compliant electrodes for extending output switch-on pulse width,” The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017). Kaohsiung, Taiwan, Jun. 18-22, pp. 2015-2018.
[8] Qihuan Zhang, Zhuoqing Yang, Qiu Xu, Mengyuan Zhao, Jinyuan Yao, Guifu Ding, Xiaolin Zhao. “A MEMS Inertial Switch with Compact Constraint Structures for Lowering Off-Axis Sensitivity”, IEEE SENSORS 2016. Orlando, USA. OCT 30-NOV 03, 2016. (Oral)
[9] Zhuoqing Yang, Shuwei liu, Fei Xue, Xiaolin Zhao, Jianmin Miao, L. K. Norford. “Micro anemometer by a MEMS compatible lab-on-a-tube technology”, The 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2015). Anchorage, Alaska, USA. pp. 383-386. (Oral)
[10] Zhuoqing Yang, Qihuan Zhang, Yi Zhang, Toshihiro Itoh, Ryutaro Maeda, Jinyuan Yao, Guifu Ding. “Fabrication of Microcoil with Large Tilt-Angle on Polymer Tube for Electromagnetically-Driven Scanner in Single Fiber Endoscope”, IEEE SENSORS 2015. Busan, Korea. pp. 1-4.
[11] Shuwei Liu, Zhuoqing Yang, Yi Zhang, Fei Xue, Shanshan Pan, Jianmin Miao, Leslie K. Norford, “Micro triple-hot-wire anemometer on small sized glass tube fabricated in 5DOF UV lithography system”, IEEE Int. Conf. on Micro Electro Mechanical Systems (IEEE MEMS 2015). Estoril, Portugal. pp. 714-717.
[12] Zhuoqing Yang, Wenguo Chen, Guifu Ding, Yan Wang, Hong Wang, Xiaolin Zhao. “Simulation and characterization of dynamic contact in a MEMS passive vibration threshold sensor”, IEEE Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2014 Symposium on, Cannes, France, pp. 1-5. (Oral)


IEEE Senior Member; CSMNT Senior Member

Editorial board members: Micro and Nanosystems; International Journal of Sensors and Sensor Networks (IJSSN); The Open Materials Science Journal.

TPC members: SENSORDEVICES2019, ICSPD2017, ICMAE2016, MDCE2016 and SJTU-ICA bilateral seminar, etc.
Reviewer for: IEEE Sensors Journal, JMM, Sens.& Actuators A: Physical, IEEE Tran. Ind. Electron.,IEEE SENSORS CONF.,INTELEC CONF., etc.

[1]Zhuoqing Yang, Hui Shen, Guifu Ding, “A detection module for damage to the goods based on the vibration acceleration”, CN201020207649.8.
[2]Zhuoqing Yang, Guifu Ding, “An inertial micro-switch with three-dimensional multi-direction sensing”, CN201010127247.1.
[3]Zhuoqing Yang, Zhenwei Zhou, Guifu Ding, “A normally closed type micro-machined inertial switch”, CN200910309574.6.
[4]Zhuoqing Yang, Kai Tao, Guifu Ding, Yan Wang, “Broadband electromagnetic micro-vibration energy harvester”, CN201010199502.3
[5]Kai Tao, Zhuoqing Yang, Guifu Ding, Yibo Wu, “An electromagnetic micro-vibration energy harvester with tunable frequency based on electro-thermal micro-driver”, CN201010289298.4.
[6]Guifu Ding, Zhuoqing Yang, Yan Wang, Hong Wang, “A nano-super-hydrophobic surface for aircraft anti-icing and its preparation method”, CN200910310788.5.
[7]Guifu Ding, Zhuoqing Yang, Xiaolin Zhao, Rui Liu, “An inertial micro-switch with conjoined snake springs”, CN200710037039.0.
[8]Guifu Ding, Zhuoqing Yang, Haogang Cai, “An inertial micro-switch with adjustable contact time”, CN200710047683.6.
[9]Guifu Ding, Kai Tao, Zhuoqing Yang, Yan Wang, “A broadband electromagnetic micro-vibration energy harvester based on permanent magnet array”, CN201010255491.6.
[10]Guifu Ding, Zhenwei Zhou, Zhuoqing Yang, Wenjing Lu, “Micro-planar gas spark gap switch”, CN201010186102.9.
[11]Guifu Ding, Haogang Cai, Zhuoqing Yang, “A general patterning method for film materials”, CN201020207649.8.
[12]Peihong Wang, Huiting Liu, Zhuoqing Yang, “Easy-to-integrated high-performance miniature electromagnetic vibration energy harvester”, CN201010248136.6
[13]Yi Zhang, Zhuoqing Yang, Toshihiro Itoh, Ryutaro Maeda, “Micro Glucose Sensors”, JP 6213987B