The Center for Advanced Electronic Materials and Devices (AEMD)


Center for Advanced Electronic Materials and Devices (AEMD) of Shanghai Jiao Tong University was invested by the ‘985 Project’ of National Education Ministry. The center intends to build university-level micro-nano processing and testing platform and perform the state of art research on semiconductor materials and devices, optoelectronic materials and devices, MEMS technologies, and IC chip packaging technologies. It also opened to the research groups outside the university.


AEMD has about 700 m2 of class 100 and class 1000 cleanroom and is equipped with micro-nano processing facilities like e-beam writer, dual-beam focused ion beam system, deep UV aligner, nano-imprinter, PECVD, mutiple-target sputtering machine, e-beam/thermal evaporator, RIE, deep RIE, oxidation/diffusion furnace, LPCVD, and wet etch and cleaning equipments, and so on; It also configured  some materials and devices characterization instrumentes like semiconductor parameter tester, Hall effect tester, 3D confocal laser scanning microscope, FE-SEM, STM-AFM, etc.


AEMD is capable of providing micro-nano processing on 6 inch and below (one quarter of the equipment is capable of providing 8 inch processing service) silicon based, glass based, and polymer based substrates with feature size down to 10nm~10um, including e-beam lithography, focused ion beam, thin film deposition, lithography, nano-imprint, and etch, diffusion and doping, cleaning, packaging and testing, etc.





[ 2013-11-29 ]